Alcatel Vacuum Technologies
ASM Series User Manual Edition 04 June 2008
User Manual
181 Pages
Preview
Page 1
A
Introduction ASM 142 - ASM 142 D ASM GRAPH - ASM GRAPH D ASM GRAPH D+
User’s Manual
Detailed contents Preliminary remarks
Throughout this User’s Manual, you could find this type of message “Summary of screen C 140”: it refers to a specific chapter of the User’s Manual. Please read it for further information.
A 100
Introduction to the ASM 142 series
A 200
ASM 142 - Detector operating principle - Vacuum circuit - Stand-by mode - Roughing mode - Gross leak test mode - Normal test mode - Sniffing test mode
A 201
ASM 142 D - Detector operating principle - Vacuum circuit - Stand-by mode - Roughing mode - Gross leak test mode - Normal test mode - Sniffing test mode
A 202
ASM 142 Graph D+ detector operating principle
GB 00206 - Edition 03 - June 08
- Vacuum circuit - Stand-by mode - Roughing mode - Gross leak test mode - Normal test mode - Sniffing test mode
A 300
Analyzer cell operating principle - Description - Design and manufacture
A 400
Testing methods - Overview - Helium concentration and signal displayed - Spray method (inboard testing) - Sniffer method (outboard testing) - Bombing method
A 401
About Helium and hydrogen - Helium - Helium and leak detection: which purity? - Hydrogen
A 500
Operator interface : control panel
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
/2
A
Introduction ASM 142 - ASM 142 D ASM GRAPH - ASM GRAPH D ASM GRAPH D+
User’s Manual
Detailed contents A 600
Options - Which options for which model? - Metal seals - Inlet port - Units - Languages - 3 masses - Automatic test chambers - Roughing system - Interface board - Remote control cable length - Test of gas line - Stainless steel cover (UCT) - Control panel with graphic interface - Control panel racks - Sniffing - Câbles lengths
Accessories - Which accessories for which model? - Remote control - Long Distance Sniffer probe - 10 m/30 feet LDS extension - Headphone connector - Transport cart - Foot pedal for cycle command (1.5 m/5 feet) - Calibrated Helium leaks - Calibration accessory - Spray probe - Inlet adaptator - Printer - Inlet filters - Short distance sniffer probe (to be connected to the inlet part of a leak detector) - Bombing chamber - Test chambers (required interface board) - Neutral gas vent line kit - 4 swiveling wheels kit (Ø125 mm) - Covered sniffer probe and remote control kit - Bottle handle for cart - Built-in mini-printer - 2005 IS Pump - Pressure measurement kit - Ventilation Kit - Bottle handle for cart
/2
A 800
ASM 142 - Technical characteristics
A 801
ASM 142 D - ASM Graph D+ - Technical characteristics
A 900
Dimensions
A 901
Dimensions - ASM graph D+
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 00206 - Edition 03 - June 08
A 700
A 100 Introduction to the ASM 142 series
A new generation of Adixen helium leak detector
The ASM 142/142 D/142 S/ASM Graph/ASM Graph D/ ASM Graph D+ are universal helium leak detectors which set new performance standards for multi-purpose unit. These detectors are the end-result of an innovative engineering approach utilizing the latest electronics technologies and vacuum concepts, which make them a truly universal unit:
high performances, such as, a roughing capacity of 7 CFM (60 l/mn) with a usable helium sensitivity in the 10-11 atm.cc/ sec range.
ASM 142
ASM Graph
x
x
high performances, such as, a dry roughing capacity of 0.9 CFM (1.5 m3/h) with a usable helium sensitivity in the 10-11 atm.cc/sec range.
ASM 142 D
ASM Graph D
GB 00207 - Edition 04 - June 08
ASM Graph D+
x
x
x
a usable helium sensitivity in the 10-7 atm.cc/sec range (with auto-zero function).
Model photographed: ASM 142
ASM 142 S
x
x
comprehensive control panel with two distinct areas (one for the operation of the unit, the other for entering the test parameters).
x
x
x
x
x
x
evolved features to assist the operator in his daily operation (auto-calibration, auto-zero, helium signal direct readout, ...).
x
x
x
x
x
x
very rugged design, based on field-proven components, which makes it ideal for any industrial environment.
x
x
x
x
x
x
various accessories to reinforce the versatility of the product (remote control, sniffer probe).
x
x
x
x
x
x
x
x
totally dry leak detector. specific to sniffing test mode applications. graphic interface.
x x
x
x
e suggest that you read this manual before you start to use W your detector to obtain optimum levels of performance and complete satisfaction. Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
/1
A 200 ASM 142 detector operating principle
Vacuum circuit 1
3 2
18
VT3
VA1
7
VT2
VC
5 VR1
4 8
VR2
VS VT1
Bacosol valve Minisol valves
GB 00208 - Edition 03 - June 08
15
Reference correspondence between valve/vacuum block marks 1
Preamplifier
VA1
Inlet vent valve (6 points)
2
Analyzer cell
VR1
Roughing valve (1 point)
3
Detector inlet port
VR2
Roughing valve (2 points)
4
Internal calibrated leak
VT1
Exhaust valve (3 points)
5
Inlet pressure gauge
VT2
Detection valve (4 points)
7
Vent connector
VT3
Detection valve (5 points)
8
Long distance sniffer connector
VS
Sniffing valve (9 points)
15
Roughing primary pump (RVP 2010)
VC
Calibration valve (7 points)
18
Detection molecular pump (AMP 007I)
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
E 530
/4
A 200 ASM 142 detector operating principle
Stand-by mode
3
1
2
VA1 7
18 VT1 15
Roughing mode (Patm to 10 mbar inlet pressure)
5 VR1
VR2
15
/4
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 00208 - Edition 03 - June 08
3
A 200 ASM 142 detector operating principle
Gross leak test mode (10 mbar to 5x10-1 mbar inlet pressure)
1
3
2
5 18 VR1
VR2
VT1 15
1
3
2 18
VT2
5
VT1 15
GB 00208 - Edition 03 - June 08
Normal test mode (lower than 5x10-1 mbar inlet pressure)
VT3
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
/4
A 200 ASM 142 detector operating principle
Sniffing test mode 1
3
2
VA1 7 18
VT1 8
VS
GB 00208 - Edition 03 - June 08
15
/4
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
A 201 ASM 142 D detector operating principle
Vacuum circuit 1
3 2 VA1
VT3
18
VC
7
VT2 5 VR1
4
8
VR2
VS VT1
10
16
12
15
Bacosol valve Minisol valves
GB 01476 - Edition 03 - June 08
Reference correspondence between valve/vacuum block marks 1
Preamplifier
VA1
Inlet vent valve (6 points)
2
Analyzer cell
VR1
Roughing valve (1 point)
3
Detector inlet port
VR2
Roughing valve (2 points)
4
Internal calibrated leak
VT1
Exhaust valve (3 points)
5
Inlet pressure gauge
VT2
Detection valve (4 points)
7
Vent connector
VT3
Detection valve (5 points)
8
Long distance sniffer connector
VS
Sniffing valve (9 points)
10
Outlet pump connector
VC
Calibration valve (7 points)
12
Purge filter
15
Roughing pump (AMD1)
16
Roughing molecular pump (MDP 5006 HDS)
18
Detection molecular pump (AMP 007I)
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
E 530
/4
A 201 ASM 142 D detector operating principle
Stand-by mode
1
3
2
VA1 7 18
VT1 16
15
Roughing mode (Patm to 10 mbar inlet pressure)
3 5
16
/4
VR2
15
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 01476 - Edition 03 - June 08
VR1
A 201 ASM 142 D detector operating principle
Gross leak test mode (10 mbar to 5x10-1 mbar inlet pressure)
1
3
2 18
5
VT1
VR1
16
1
VR2
15
3
2 VT2
Normal test mode (lower than 5x10-1 mbar inlet pressure)
18 VT3
5
VT1 15
GB 01476 - Edition 03 - June 08
16
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
/4
A 201 ASM 142 D detector operating principle
Sniffing test mode
1
3
2
VA1 7 18
8
VS VT1 15
GB 01476 - Edition 03 - June 08
16
/4
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
A 202 ASM 142 Graph D+ detector operating principle Vacuum circuit 1
3 2 VA1
VT3
18
VC
7
VT2 5 VR1
4
8
VR2
VS VT1
10
16
12
15
Bacosol valve Minisol valves
GB 03710 - Edition 01 - June 08
Reference correspondence between valve/vacuum block marks 1
Preamplifier
VA1
Inlet vent valve (6 points)
2
Analyzer cell
VR1
Roughing valve (1 point)
3
Detector inlet port
VR2
Roughing valve (2 points)
4
Internal calibrated leak
VT1
Exhaust valve (3 points)
5
Inlet pressure gauge
VT2
Detection valve (4 points)
7
Vent connector
VT3
Detection valve (5 points)
8
Long distance sniffer connector
VS
Sniffing valve (9 points)
10
Outlet pump connector
VC
Calibration valve (7 points)
12
Purge filter
15
Roughing primary pump (ACP 15)
16
Roughing molecular pump (MDP 5006 HDS)
18
Detection molecular pump (AMP 007I)
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
E 530
/4
A 202 ASM 142 Graph D+ detector operating principle Stand-by mode
1
3
2
VA1 7 18
VT1 16
15
Roughing mode (Inlet pressure: Patm to 10 mbar)
3 5
16
/4
VR2
15
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 03710 - Edition 01 - June 08
VR1
A 202 ASM 142 Graph D+ detector operating principle Gross leak test mode (Inlet pressure: 10 mbar to 5x10-1 mbar)
1
3
2 18
5
VT1
VR1
16
1
VR2
15
3
2 VT2
Normal test mode (Inlet pressure: lower than 5x10-1 mbar)
18 VT3
5
VT1 15
GB 03710 - Edition 01 - June 08
16
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
/4
A 202 ASM 142 Graph D+ detector operating principle Sniffing test mode
1
3
2
VA1 7 18
8
VS VT1 15
GB 03710 - Edition 01 - June 08
16
/4
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
A 300 Analyzer cell operating principle
Description
The analyzer cell works on the principle of mass spectrometry and is set to the mass of helium (m/e = 4). m/e = atomic mass of the particle/number of electrons lost on ionization The principle of magnetic deflexion spectrometry is as follows. The neutral molecules of the gas being analyzed pass into an ionization chamber (or source of ions) where they are bombarded by an electron beam generated by a heated tungsten filament. A large number of the molecules are transformed into ions.
� He
�
He
�
He
���Leak Signal
6
��
�
��� ���
�
�� ��� ���
������������������ ����������������������
����
� ����
�����������
���
���
� ���
�
������������������
GB 00007 - Edition 03 - September 04
������
������������������� �������������������� � ��� ���
������������������� �������������������
��������������
������������
He
�����������
������������
Analyzer cell - functional diagram Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
1/3
A 300 Analyzer cell operating principle
Description (continued)
These ionized particles are accelerated by an electrical field. The entire analyzer cell is subject to a magnetic field which has the property of deflecting the trajectories of the ions along different curves according to the masses of those ions (to be more precised, according to their m/e ratios). Thus the ions beam, which contained ions with different masses, is divided into several beams, each containing only ions with the same m/e ratio. The helium ions (m/e = 4) are separated from the lighter (H2+ or H1+, smaller beams) or heavier ions (N2+ or O2+, small beams). Because there is a constant magnetic field (permanent magnet), the accelerator electrical field is adjusted so that the helium ions (m/e = 4) follow a pre-determined trajectory (passing through diaphragms) and arrive on the target at the input to a direct current amplifier. The current of helium ions is proportional to the partial pressure of helium in the installation and by measuring it we can find the flow rate of the leak that has been detected.
In order to separate the helium ions from «noise» caused by «stray ions», an electrode located in front of the target eliminates the secondary ions with low energies. This electrode is called the «braking electrode». There is an auxiliary electrode at the top of the cell, shaped like a plate, which collects the ions that are heavier than helium. This electrode thus measures the total pressure in the analyzer. This electrode serves as the plate for a triode gauge, hence its name of «triode electrode».
2/3
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 00007 - Edition 03 - September 04
It is essential that the total pressure in the analyzer cell is less than 10-4 mbar, so that the trajectories of the electrons and the ions are not disturbed by residual molecules. Around 10-3 mbar there is a risk of damaging the heated filament.
A 300 Analyzer cell operating principle
Design and manufacture
Great care has been taken with the design and manufacture of the cell in order to repeatedly obtain the same characteristics and to achieve excellent stability: – the metal parts are made of stainless steel, – the filament holder is made of machined aluminium, – there is an integral amplifier. The cell assembly is composed of: – a vacuum chamber or deflection chamber, – an optic holder flange, – a permanent magnet, – an amplifier. • The vacuum chamber: The analysis cell vacuum chamber is made of light alloy. It is hollow with a rectangular opening into which the electrodes, (that are installed on the «optics holder» flange) are placed.
GB 00007 - Edition 03 - September 04
• The optics holder flange: The optics holder flange supports all the electrodes and electrical connections in the cell. They include: – the sealed power supply socket, mounted on a metal gasket, – the amplifier, mounted on an elastomer gasket, vthe supporting block which screens the target and on which the source of ions is mounted, – the source of ions, which is made up of 2 parts: • a filament holder, • an ionization chamber with a stainless steel electron collector and a mass ion emitter. The filament holder mechanically positions the tungsten filament with respect to the ionization chamber. The electron collector and the filament have been designed and positioned so that the temperature of the electron collector stabilizes at 400°C under bombardment and radiation from the filament. The cell is thus rendered immune to contamination from the pieces being tested without the need of any special heating system.
Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
3/3
A 400 Testing methods
Overview
Leak detection is used to detect micro-openings, porosities, etc. in test parts. The detection of these cracks involves the use of a light tracer gas, which is capable of infiltrating the smallest leak quickly: Helium. The detector samples and measures the helium flow rate entering the test part via the leak(s). The testing method is selected according to the test part and the measurement accuracy required:
The part can be connected to an evacuation line
no
The part is sealed
yes Its characteristics allow it to be evacuated
GB 00008 - Edition 05 - February 02
yes
SPRAY method laeak rate measurement from 10-10 to 10-1 mbar. l/s and possibility of locating the leak.
no
Its characteristics allow it to be pressurized with helium or a mixture containing helium yes
SNIFFING method Minimum detectable leak of 10-6
mbar.l/s and possibility of locating the leak.
Its characteristics allow it to be placed in a vacuum vessel yes
BOMBING method The sensitivity is limited by the internal dead volume of the part as well as on the bombing time and the pressurization value. Global test without possible location of the leak.
Alcatel Vacuum Vacuum Technology Technology France France -- Technical ATH 200 Reference User’s Manual Alcatel Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
1/4
A 400 Testing methods
Helium concentration and signal displayed
In accordance to the He concentration rate in the gas used for the leak detection, the signal displayed will change. Example: signal displayed with a 1x10-7 mbar.l/s calibrated leak (with 100 % He) connected to the detector inlet.
Spray method (inboard testing)
% He in the gas used
100 %
10 %
1%
Signal displayed on the leak detector
1x10-7 mbar.l/s
1x10-8 mbar.l/s
1x10-9 mbar.l/s
This involves removing air from the test part, connecting it to the analyzer and then spraying helium over the outer surface. Global test
Spray test
or
part spray probe
He
part
detector
detector
The part is placed under a cover, into which helium is injected.
Potential leaking areas are sprayed with helium.
The leak cannot be located.
The leak can be located.
The detector measures the flow of helium penetrating the part.
Response time
When spraying starts, the leak signal is not displayed instantaneously on the analyzer: there is a response time which depends on the volume V being tested and the helium pumping speed S of the system at the opening of the part, according to the following relation: T = V/S
(T in seconds, V in litres, S in l/s)
T is the time required for the signal to reach 63 % of the final value.
2/4
Alcatel Vacuum Technology France - ATH 200 User’s Manual Alcatel Vacuum Technology France - Technical Reference Manual ASM 142/142 D - ASM GRAPH/GRAPH D/GRAPH D+
GB 00008 - Edition 05 - February 02
He